Publications
Comenencia Ortiz, L., et al. "Low-Power Dual Mode MEMS Resonators With PPB Stability Over Temperature." Journal of Microelectromechanical Systems, 2020, pp.190-201.
Comenencia Ortiz, L., et al., “Assessing Failure in Epitaxially Encapsulated Micro-Scale Sensors Using Nano and Micro X-ray Computed Tomography” MRS Communications, 2018, pp. 275-282.
Comenencia Ortiz, L., et al., "Thermal Effects of Ovenized Clocks on Episeal Encapsulated Inertial Measurement Units", To be presented at the 2017 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
Comenencia Ortiz, L., et al., ”A New Low Power Dual Mode MEMS Clock with PPB Stability Over Temperature.” Solid State, Actuators and Microsystems Workshop, Hilton Head, 2018.
Comenencia Ortiz, L., et al., “Enhancing Micro-Oven Power and Stiffness in Encapsulated Devices for Timing Reference Applications.” Solid State, Actuators and Microsystems Workshop, Hilton Head, 2018.
Kwon, H. K., Comenencia Ortiz, L., Vukasin, G. D., Chen, Y., Shin, D. D., & Kenny, T. W. (2019, June). "An Oven-Controlled MEMS Oscillator (OCMO) With Sub 10mw,±1.5 PPB Stability Over Temperature." In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), pp. 2072-2075).
Flader, I. B, Chen, Y., Shin, D. D., Heinz, D. B., Comenencia Ortiz, L., et al., "Micro-tethering for fabrication of encapsulated inertial sensors with high sensitivity." Journal of Microelectromechanical Systems, 2019, pp. 372-381.
Vukasin, G.D., Rodriguez, J., Comenencia Ortiz, L., and Kenny, T.W., “Direct Measurements of Anchor Damping in Pressure-Limited Ring Resonators,” Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head, 2018.
Alter, A. L., Flader, I. B., Chen, Y., Comenencia Ortiz, L. and T. W. Kenny, “First Fatigue Measurements on Thick Epi- Polysilicon MEMS in Ultra-Clean Environment,” Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head, 2018.
Kwon, H.-K., Heinz, D. B., Shin, D. D., Chen, Y., Comenencia Ortiz, L., and Kenny, T.W., “Precise Local Temperature Measurement of Fully Encapsulated Ovenized MEMS Devices,” Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head, 2018.
Gerrard, D., Rodriguez, J., Comenencia Ortiz, L., et al., (2017) Manipulation of Heat Flux Paths in Thermo-elastically Damped Resonators for Q Optimization. IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, pp. 1130-1133.
Rodriguez, J., Gerrard, D.D., Glaze, G.M., Chandorkar, S., Comenencia Ortiz, L. et. al, “Direct Measurements of Anchor Damping in MEMS Resonators,” International Conference on Sensors, 2017
Rodriguez, J., Vukasin, G. D., Glaze, G. M., Hopcroft, M. A., Comenencia Ortiz, L., Ahn, C. H., Ng, E., Park, W., Kenny, T. W. and Watson, C. A. "Investigation of Orientation Dependence of the Thermal Expansion Coefficient in Silicon MEMS Resonators." In 2018 IEEE International Frequency Control Symposium (IFCS), 2018, pp. 1-4.
Flader, I. B, Chen, Y., Shin, D. D., Heinz, D. B., Comenencia Ortiz, L., et al., Micro-tethering for in-process stiction mitigation of highly compliant structures. IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, pp. 675-678.
Heinz, D. B., Flader, I. B., Chen, Y. , Vukasin, G. D., Comenencia Ortiz, L., and Kenny, T. W. Direct Comparison of Stiction Properties of Oxide Coated Polysilicon and Smooth Single Crystal Silicon. To be presented at Transducers 2017 Conference and proceedings to follow.
Chen, Y., Flader, I. B., Shin, D. D., Ahn, C. H., Comenencia Ortiz, L. and Kenny, T. W. Fabrication of Wide and Deep Cavities for Silicon MEMS Devices Without Wafer Bonding. To be presented at Transducers 2017 Conference and proceedings to follow.